2020-09-28 www Kimball直线轰击型电子枪EGG-3101 / EGPS-3101 Kimball直线轰击型电子枪EGG-3101 / EGPS-3101 能量范围:100 eV to 10 keV 束流范围:10 nA to 100 µA / 1 nA to 10 µA / 1 µA to 1 mA 束斑范围:0.5 mm to 25 mm / 60 µm to 10 mm / 1.5 mm to 25 mm