Ion Gun Systems离子枪

Kimball Physics ion gun systems, or ion sources, are used for surface physics, space physics, vacuum physics, charge neutralization, detection calibration, secondary ion mass spectrometry and ion injection for MBE.

 

Range of Operation

  • Energy Ranges: 10eV to 5 keV
  • Beam Current Ranges: 1 nA to 2 μA
  • Spot Size Ranges: 1 mm to 20 mm


Ion Sources

  • Electron impact ionization sources: 
    – Inert gases (He, Ar, Xe, Ne) 
    – Active gases (N2 or O2)
  • Solid state chemical reaction: 
    – Alkali metal compound (Cs+, Li+, Na+, K+ or Rb+ ions)


Performance

  • Beam Current Stability: ±1.0% per hour with Emission Current Control or ±10% per hour after warm up without ECC for alkali metal sources.
  • Energy Stability: ± 0.01% per hour, ± 0.02% per 8 hours at full output.


Versatility

  • Flexible Controllers: Independent fiber optic control and metering of functions such as ion energy, source, electron energy, field control, extract, focus, X – Y deflection and electron current control.
  • Gas feed ion sources allow for different ion species


Convenience

  • Customer-replaceable source assemblies
  • Storable control settings
  • Computer remote control / metering

 

Operational Capabilities

  • Fast capacitive beam or dual grid pulsing
  • Deflection / Rastering
  • Gun-mounted Faraday cups​​

 

Ion Gun Systems
Gun Model Key Characteristics Specifications Features/Options
IGS-4

 

Alkali metal
Cs+, Li+, Na+, K+, Rb+

 

2¾CF Mounted

Energy Range: 50 eV to 5 keV 
Beam Current: 1 nA to 2 μA 
Spot Size: 1 mm to 20 mm
  • Deflection
  • Pulsing
ILG-6

 

Alkali metal
Cs+, Li+, Na+, K+, Rb+

 

2¾CF Mounted

Energy Range: 10 eV to 1 keV 
Beam Current: 1 nA to 100 nA 
Spot Size: 1 mm to 5 mm
  • Demountable
  • Deflection
  • Pulsing
  • Rastering
TEMPORARILY UNAVAILABLE
IGL-2101

 

Gas fed
Inert (He, Ar, Xe, Ne) 
Active (N2 or O2)

 

2¾CF Mounted

Energy Range: 10 eV to 1 keV 
Beam Current: 1 nA to 100 nA
Spot Size: 1 mm to 20 mm
  • Differential pumping
  • Deflection
  • Rastering
Energy Range: 10 eV to 5 keV 
Beam Current: 1 nA to 100 nA 
Spot Size: 1 mm to 20 mm

 

 Electron Gun
 ELG-2
 FRA-2X1-2
 EGA-1012
 EFG-7
 EGPS-1017
 EGPS-2017
 EGL-2022
 EGG-3101
 EGG-3103
 EGF-3104
 EMG-4212
 EGPS-3212
 EMG-4212
 EGPS-4212
 EMG-4103
 EMG-4215
 EMG-4210
 EGH-6002
 EGF-6115
 EGF-6104
 EGH-6210
 EGH-8101
 EGH-8103
 EGH-8105
 EGH-8201
 EGH-8202
 Ion Gun
 IGS-4
 ILG-6
 IGL-2101
 Cathodes
 Emitters
 ES-423E
 ES-423E-GR
 ES-440
 ES-042
 ES-044
 ES-046
 ES-015
 ES-064
 ES-066
 ES-525
 ES-526
 ES-529
 CB-104
 CB-105
 C423E
 A423E
 B423E
 C423E
 C423E
 C423E
 E423E
 HL423E
 H423E
 I423E
 JE423E
 JG423E
 JP423E
 J423E
 C423E
 O423E
 E423E
 P423E
 S423E
 SE423E
 G423E
 G423E
 Z423E
 ES-020
 ES-021
 ES-030
 ES-030
 ES-028
 ES-033
 ES-029
 FC-66
 FC-70
 FC-71
 FC-72
 FC-73
 FC-86B
 PHOS-RP22SS-B5X5-R500
 PHOS-UP22SS-B5X5-R500
 PHOS-RP22SS-B7X7-R750
 PHOS-UP22SS-B7X7-R750
 PHOS-RP22SS-C5X5-R1000
 PHOS-UP22SS-C5X5-R1000
 PHOS-RP22SS-C7X7-R1500
 PHOS-UP22SS-C7X7-R1500
 PHOS-RP22GL-B5X5-R500
 PHOS-UP22GL-B5X5-R500
 PHOS-RP22GL-B7X7-R750
 PHOS-UP22GL-B7X7-R750
 PHOS-RP22GL-C5X5-R1000
 PHOS-UP22GL-C5X5-R1000
 PHOS-RP22GL-C7X7-R1500
 PHOS-UP22GL-C7X7-R1500
 PHOS-RP22GL-CF2.75 P22
 PHOS-UP22GL-CF2.75 P22
 PHOS-RP22GL-CF4.5 P22
 PHOS-UP22GL-CF4.5 P22
 PHOS-RP22GL-CF6.0 P22
 PHOS-UP22GL-CF6.0 P22
 Faraday
 Faraday Cups
 Phosphor
 Phosphor Screens
 MCF133-SphCube-A6
 MCF275-SphCube-C6
 MCF275-SphCube-C4A8
 MCF275-SphCube-C5A4
 MCF275-SphCube-C6A8
 MCF450-SphCube-E6
 MCF450-SphCube-E6A8
 MCF450-SphCube-E6C8
 MCF450-SphCube-E6C8A12
 MCF600-SphCube-F6
 MCF600-SphCube-F6C8
 MCF600-SphCube-F6C8A24
 MCF800-SphCube-G6C8
 MCF133-SphTri-A5
 MCF275-SphTri-C5
 MCF450-SphSq-E2C4
 MCF450-SphSq-E2C3r1A4
 MCF600-SphSq-F2C4A8
 MCF600-SphSq-F2E4A4
 MCF600-SphSq-F2E4A8
 MCF800-SphSq-G2E4
 MCF800-SphSq-G2E4C4
 MCF800-SphSq-G2E4C4A16
 MCF600-SphPent-F2C5
 MCF600-SphPent-F2C5A2
 MCF275-SphHex-C2A6
 MCF275-SphHex-Cc2A6
 MCF800-SphHex-G2E6
 MCF275-SphOct-C2A8
 MCF450-SphOct-E2A8
 MCF450-SphOct-Ec2A8
 MCF600-SphOct-F2A8
 MCF600-SphOct-F2C8
 MCF800-SphOct-G2C8
 MCF800-ExtOct-G2C8
 MCF800-ExtOct-G2C8A16
 MCF1000-SphOct-H2C8
 MCF800-SphDec-G2C10
 MCF600-SphHexadecagon-F2A16
 MCF133-DblSphCube-A10
 MCF275-SphTrpOct-Cr2A16
 MCF275-SphTrpOct-C18
 MCF275-FlgAdptr-C1A1
 MCF275-FlgAdptr-C2
 MCF450-FlgAdptr-E2
 MCF133-PWeldFlg
 MCF275-PWeldFlg
 MCF450-PWeldFlg
 MCF600-PWeldFlg
 MCF800-PWeldFlg
 MCF133-ThnFlg-A2-175
 MCF133-ThnFlg-A2-175-ID640
 MCF133-ThnFlg-A2-400
 MCF133-ThnFlg-A2-400-ID640
 MCF275-ThnFlg-C2-175
 MCF275-ThnFlg-C2-175-ID1500
 MCF275-ThnFlg-C2-400
 MCF275-ThnFlg-C2-400-ID1500GG
 MCF450-ThnFlg-E2-175
 MCF450-ThnFlg-E2-175-ID2900
 MCF450-ThnFlg-E2-400
 MCF450-ThnFlg-E2-400-ID2900GG
 MCF600-ThnFlg-F2-175
 MCF600-ThnFlg-F2-175-ID4300
 MCF600-ThnFlg-F2-400
 MCF600-ThnFlg-F2-400-ID4300GG
 MCF800-ThnFlg-G2-175
 MCF800-ThnFlg-G2-175-ID6300
 MCF800-ThnFlg-G2-400
 MCF800-ThnFlg-G2-400-ID6300GG
 MCF275-MtgFlg-C2
 MCF275-MtgFlg-C1Blk
 MCF275-MtgFlg-C1VP
 MCF450-MtgFlg-E2
 MCF450-MtgFlg-E1Blk
 MCF450-MtgFlg-E1VP
 MCF600-MtgFlg-F2
 MCF600-MtgFlg-F1Blk
 MCF600-MtgFlg-F1VP
 MCF800-MtgFlg-G2
 MCF800-MtgFlg-G1Blk
 MCF600-ClsCplr-F1r1
 MCF800-ClsCplr-G1r1
 MCF275-ExtBrkt-R
 MCF275-ExtBrkt-LS
 MCF450-ExtBrkt-LS
 MCF600-ExtBrkt-LS
 MCF600-ExtBrkt-SM
 MCF800-ExtBrkt-LS
 MCF275-GrvGrb-C01
 MCF275-GrvGrb-C02
 MCF275-GrvGrb-CB03
 MCF275-GrvGrb-CB04
 MCF275-GrvGrb-CYL0750
 MCF275-GrvGrb-CYL1000
 MCF450-GrvGrb-C01
 MCF450-GrvGrb-C02
 MCF450-GrvGrb-C03
 MCF450-GrvGrb-C04
 MCF450-GrvGrb-CYL1750
 MCF600-GrvGrb-C01
 MCF800-GrvGrb-C01
 MCF1000-GrvGrb-C01

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