EGL-2022 / EGPS-2022电子枪

Electron Gun System: 50 eV to 5000 eV

Quick Overview

Constant beam current and spot size over broad energy range

Energy Range: 50 eV to 5000 eV
Beam Current: 1 nA to 100 µA
Spot Sizes: 1 mm to 10 mm
Mounting: 2¾CF
Features/Options: Zoom Lens Focusing for Energy Sweeping, Deflection, Rastering, High Speed Pulsing

 

FOR USE IN:
Surface Physics Studies
Ionization Experiments
Charge neutralization

FEATURES / OPTIONS:
Wide Energy range
Constant Beam Current
Constant Spot Size
Zoom Lens Focusing
High Speed Pulsing
Deflection, Rastering
Computer / Remote Control

EGL-2022 ELECTRON GUN SPECIFICATIONS:
BEAM ENERGY :50 eV to 5 keV (Independently adjustable)
BEAM CURRENT :Standard: 1 nA to 100 μA (Independently adjustable)
ENERGY SPREAD:
Approx. cathode thermal spread, calculated 
Ta – 0.5eV Y2O3 – 0.4eV 
BaO – 0.3eV LaB6 – 0.4eV
SPOT SIZE :1 mm to 10 mm (Independently adjustable)
WORKING DISTANCE :Variable: 20 mm to 100 mm
BEAM DEFLECTION :4 pole electrostatic: ± 3.5° at 5 keV; scales larger at lower energies
PULSE CAPABILITY(using appropriate pulse generator, not included):
Optional capacitive Pulse Junction Box: pulse width 20 ns to 100 μs , rise/ fall 10 ns, 50 Ω impedance, 1 W standard (higher power available)
Optional Dual Grid Power Supply: pulse width 2 μs to DC, rise/ fall 500 ns, rep rates to 5kHz (TTL required)
BEAM UNIFORMITY :Gaussian
FIRING UNIT:
Customer-replaceable Firing Unit includes precision-aligned cathode and Wehnelt (G-1) assembly,with insulators and connectors
CATHODE TYPES:
Standard: Tantalum disc
Optional: Lanthanum hexaboride (LaB6), Barium oxide (BaO), or Yttrium oxide (Y2O3) With the exception of Barium oxide, cathodes not harmed by repeated exposure to atmospheric gases while cold
MOUNTING:
Flange Multiplexer with a 2¾ inch rotatable CF,including both tapped and clear mounting holes.
Optional unmounted model with 9 in-vacuum leads.
BEAM ALIGNMENT Optional: Mechanical alignment with ± 2° Port Aligner
INSERTION LENGTH
Standard: 200 mm, Range: 200 mm to 300 mm. Custom lengths available. Gun manufactured at standard length unless otherwise specified at time of order. 
GUN DIAMETER :34 mm, gun tube in vacuum
FEEDTHROUGHS: Multi-pin brazed ceramic, threaded stainless steel shell
CABLES /CONNECTORS
Multi-conductor high voltage fully ground-shielded cable,coaxial grid cable, low voltage deflection cable, with mating aluminum shell connectors, to connect gun and power supply.

Standard lengths: 3 m Optional: 5 m 
MAXIMUM BAKEOUT :350°C with cables removed

 

EGPS-2022 ELECTRON GUN POWER SUPPLY SPECIFICATIONS:
OUTPUT All necessary voltages to drive the EGL-2022 Electron Gun
ENERGY STABILITY: ±0.01% per hour; ±0.02% per 8 hours at full output
BEAM STABILITY: ±0.1% per hour with Emission Current Control or ±10% per hour after warm up without ECC
CONTROLS :FlexPanel controls: Energy, Source, Grid, First Anode,Focus, X and Y Deflection, Emission Current Control
METERING:
FlexPanel digital meters: Energy, Source Voltage,Source Current, Emission Current, Grid, First Anode Voltage, Focus, X and Y Deflection
COMPUTER/REMOTE CONTROL & METER
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
Metering: 0 to +2 V ( -2 V to +2 V, deflection)
Standard 50-pin connector for analog input/output and RS-232 serial port (RS-422 or RS-485 available, if specified at time of order)
Optional: SCSI metering and programming connectors
SOFTWARE: Standard configuration designed for RS-232 connections. 
Optional: National Instruments LabVIEWTM file, designed to run with computer DAQ boards NI PCI-6713 and  PCIe-6341. SCSI connections.
INPUT 115 VAC or 230 VAC, 50 to 60 Hz single phase, 250 VA
ENVIRONMENT :Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH non condensing, 
Classified as a pollution degree 2, installation category (overvoltage category) II environment unit
DIMENSIONS(width x height x depth);
17 in. x 3.5 in. x 22 in. excluding handles 
(425 mm x 90 mm x 560 mm); 19 in. rack mountable

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