Electron Gun System: 100 eV to 5000 eV
Quick Overview
Narrow-angle or uniform wide-angle beam
Energy Range: 100 eV to 5000 eV
Beam current / Spot sizes:
Standard: 10 nA to 100 µA / 1 mm to 100 mm
High Current: 10 nA to 1 mA / 3 mm to 100 mm
Mounting: 2¾CF, demountable option
Features/Options: Flood Beam or Narrow-Angle Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing
FOR USE IN:
Surface Physics Studies
Vacuum Physics Experiments
Charge Neutralization
Electron Desorption
Surface Scrubbing
Phospher Testing
Ionization Experiments
Semiconductor Processing
FEATURES / OPTIONS:
Widely Controllable Parameters
Flood Beams or Narrow Angle Beam
Electrostatic Focusing
Deflection, Rastering, Pulsing
Demountable Gun
Computer / Remote Control
5 keV MODEL EFG-7 ELECTRON GUN SPECIFICATIONS：
BEAM ENERGY ：100 eV to 5 keV (Independently adjustable)
BEAM CURRENT ：Standard: 1 nA to 100 μA (Independently adjustable)
ENERGY SPREAD：Approx. cathode thermal spread, calculated Ta – 0.5eV Y2O3 – 0.4eV BaO – 0.3eV
SPOT SIZE ：Standard: 1 mm to 100 mm (Independently adjustable)
WORKING DISTANCE：Variable: 25 mm to 200 mm
BEAM DEFLECTION ：Optional: 4 pole electrostatic: ± 3° at 5 keV; scales larger at lower energies
PULSE CAPABILITY(using appropriate pulse generator,not included)：
Optional Capacitive Pulse Junction Box: pulse width 20 ns to 100 μs , rise/ fall 10 ns, 50 Ω impedance, 1 W standard (higher power available)
Optional Dual Grid Power Supply: pulse width 2 μs to DC, rise/ fall 500 ns, rep rates to 5kHz (TTL required)
BEAM UNIFORMITY ：Gaussian or uniform. depending on operation
FIRING UNIT：
Customer-replaceable Firing Unit includes precision-aligned cathode and Wehnelt (G-1) assembly and anode, with insulators and connectors
CATHODE TYPES：
Standard: Tantalum disc
Optional: Barium oxide (BaO) or Yttrium oxide (Y2O3) With the exception of Barium oxide, cathodes not harmed by repeated exposure to atmospheric gases while cold
MOUNTING：
Standard: Flange Adaptor with a 2¾ inch CF (no deflect)
Optional: Flange Multiplexer with a 2¾ inch rotatable CF,including both tapped and clear mounting holes
Optional: Demountable (Unmounted / Mounted) with a Flange Multiplexer with a 2¾ inch rotatable CF
BEAM ALIGNMENT ：Optional: Mechanical alignment with ± 2° Port Aligner
INSERTION LENGTH：
Standard: 160 mm, Range: 120 mm to 180 mm.
Demounted gun :Gun length with pins 135 mm standard Custom lengths available. Gun manufactured at standard length unless otherwise specified at time of order.
GUN DIAMETER：
25.4 mm at the gun flange, necks down to 19.1 mm at100 mm from the flange
FEEDTHROUGHS ：Multi-pin brazed ceramic, threaded stainless steel shell
CABLES /CONNECTORS
Multi-conductor high voltage fully ground-shielded cable,coaxial grid cable, low voltage deflection cable, with mating aluminum shell connectors, to connect gun and power supply.
Standard lengths: 3 m Optional: 5 m MAXIMUM BAKEOUT 350°C with cables removed
EGPS-2017 ELECTRON GUN POWER SUPPLY SPECIFICATIONS：
OUTPUT ：All necessary voltages to drive the High Energy EFG-7 Electron Gun
ENERGY STABILITY ：±0.01% per hour; ±0.02% per 8 hours at full output
BEAM STABILITY ：±0.1% per hour with Emission Current Control or±10% per hour after warm up without ECC
CONTROLS FlexPanel controls: Energy, Source, Grid, Focus, Emission Current Control, optional X and Y Deflection
METERING： FlexPanel digital meters: Energy, Source Voltage,Source Current, Emission Current, Grid, Focus,optional X and Y Deflection
COMPUTER/REMOTE CONTROL & METER
Power supplies: 0 to +10 V (-10 V to +10 V, deflection)
Metering: 0 to +2 V ( -2 V to +2 V, deflection)
Standard 50-pin connector for analog input/output and RS-232 serial port (RS-422 or RS-485 available, if specified at time of order)
Optional: SCSI metering and programming connectors
SOFTWARE ：Standard configuration designed for RS-232 connections.
Optional: National Instruments LabVIEWTM file, designed to run with computer DAQ boards NI PCI-6713 and PCIe-6341.SCSI connectors
INPUT 115 VAC or 230 VAC, 50 to 60 Hz single phase, 250 VA
ENVIRONMENT ：Temperature: 0 to 40ºC, Relative humidity: 0 to 75% RH non condensing,
Classified as a pollution degree 2, installation category (overvoltage category) II environment unit
DIMENSIONS (width x height x depth)：
17 in. x 3.5 in. x 22 in. excluding handles
(425 mm x 90 mm x 560 mm); 19 in. rack mountable