Electron Gun System: 10 eV to 1500 eV
Quick Overview
Narrow-angle or uniform wide-angle beam
Energy Range: 10 eV to 1500 eV
Beam Current / Spot Size:
Standard: 1 nA to 100 µA / 1 mm to 100 mm
High Current: 1 nA to 1 mA / 3 mm to 100 mm
Mounting: 2¾CF, demountable option
Features/Options: Narrow-Angle Beam or Flood Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing
FOR USE IN:
SURFACE PHYSICS STUDIES
VACUUM PHYSICS EXPERIMENTS
CHARGE NEUTRALIZATION
ELECTRON DESORPTION
SURFACE SCRUBBING
PHOSPHOR TESTING
IONIZATION EXPERIMENTS
SEMICONDUCTOR PROCESSING
FEATURES / OPTIONS:
WIDELY CONTROLLABLE PARAMETERS
FLOOD BEAMS or NARROW ANGLE BEAMS
ELECTROSTATIC FOCUSING
DEFLECTION, RASTERING, PULSING
DEMOUNTABLE GUN
COMPUTER / REMOTE CONTROL
The Kimball Physics EFG-7 Electron Gun, with its matching EGPS-1017 Power Supply, is intended for use in a variety of UHV,surface physics, and processing applications. It is a complete subsystem ready to attach and turn on. Beam energy, beam current and spot size are independently adjustable over wide ranges.
The EFG-7 Electron Gun uses a refractory metal cathode to generate a uniform flood beam. The gun design allows for generation of the beam down to low energies, and very low currents.
The standard model EFG-7 produces a beam current of 1 nA to 100 μA and energies of 50 eV to 1500 eV. A High Current option provides beam currents up to 1 mA.
Centering deflection, rastering and pulsing are all available as options.
Because the design has been optimized as a flood gun and uses a cylindrical 4-pole deflector, deflection aberrations can be severe when the beam is focused into a small spot.
UHV technology is used throughout. The gun can be run in vacuums from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The electron gun is bakable to 350°C with cables removed.
Optional cathodes include: barium oxide discs (BaO, low light, low energy spread, min. vacuum 1×10-7 torr) and yttria-coated iridium discs(Y2O3 – Ir, rugged, vacuum up to 10-4 torr, may survive brief loss ofvacuum).
With the exception of BaO, the cathodes are not damaged by repeated exposure to atmospheric gases or water vapor when cold.
Cathode lifetime is a function of vacuum conditions and beam current as related to cathode temperature. Cathode lifetime at low currents in good vacuum may be in the many hundreds of hours, or even over a thousand hours.
Firing units are user-replaceable; spare firing units can be purchased new, and used firing units may be returned to the factory for rebuild.
Alternatively, the entire electron gun can be sent back to the factory for complete cleaning, rebuild, cathode replacement, and optional in-vacuum testing.
The EFG-7 Electron Gun is available in three different mounting configurations. The standard gun is without deflection and is mounted on a 2¾ CF Flange Adaptor with a single cable connector.
With optional deflection, the gun is mounted on a 2¾ CF Flange Multiplexer with separate source, grid and deflection connectors. A demountable style shown above is also available for a gun with deflection.
The demountable gun can be used as mounted gun, or it can be removed by the user from its mounting and used as an unmounted gun with the Flange Multiplexer as a separate vacuum feedthrough.